中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2021, Vol. 21 ›› Issue (2): 020102 . doi: 10.16257/j.cnki.1681-1070.2021.0211

所属专题: GaN 电子器件与先进集成

• “GaN 电子器件与先进集成”专题 • 上一篇    下一篇

GaN HEMT电力电子器件技术研究进展*

鲍 婕1,2,周德金3,4,陈珍海1,4,宁仁霞1,吴伟东2,黄 伟3   

  1. 1.黄山学院智能微系统安徽省工程技术研究中心,安徽 黄山 245041; 2.多伦多大学电气与计算机工程学院,加拿大 多伦多 M5S3G4;3.复旦大学微电子学院,上海 200443;4.清华大学无锡应用技术研究院,江苏 无锡 214072
  • 收稿日期:2020-09-28 出版日期:2021-02-24 发布日期:2021-01-04
  • 作者简介:鲍婕(1982—),女,安徽黄山人,博士,教授,主要研究方向是半导体封装技术。

Advances in GaN HEMT Power Devices TechnologyResearch

BAO Jie1,2, ZHOU Dejin3,4,CHEN Zhenhai1,4, NING Renxia1, NG Wai Tung2, HUANG wei3   

  1. 1. Engineering?Technology?Research?Center?of?Intelligent Microsystems of Anhui?Province, Huangshan University,Huangshan 245041, China; 2. The Edward S. RogersSr. Department of Electrical and Computer Engineering, University of Toronto,Toronto M5S3G4, Canada; 3. School ofMicroelectronics,?Fudan University, Shanghai 200443, China ; 4.Wuxi Research Institute of Applied Technologies, Tsinghua University,Wuxi 214072, China
  • Received:2020-09-28 Online:2021-02-24 Published:2021-01-04

摘要: GaN HEMT器件由于其击穿场强高、导通电阻低等优越的性能,在高达650 V额定电压等级的高效、高频转换器中有着广泛的应用前景。GaN HEMT器件的特性优势与其工艺结构、材料特性密切相关。介绍了耗尽型、增强型GaN HEMT的典型器件结构,并将国内外对结构设计以及材料优化等关键技术问题的研究现状进行了综述,并概括总结了GaN HEMT的技术发展趋势和最新参数指标。

关键词: GaNHEMT, p-GaN, 增强型, MIS-HEMT

Abstract: GaN HEMT (high electron mobility transistor) devices have a wide application prospect in high efficiency and high frequency converters with rated voltage up to 650 V, due to their excellent features such as high breakdown voltage and low on-resistance. The characteristic advantages of GaN HEMT devices are closely related to their structures and material properties. The typical device structures of depletion and enhancement GaN HEMT are introduced. The global research status of key technical issues about the structural design and material optimization are reviewed. Finally, the technology development trend and the latest parameters of GaN HEMT are summarized.

Key words: GaNHEMT, p-GaN, enhancementmode, MIS-HEMT

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