中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2022, Vol. 22 ›› Issue (12): 120202 . doi: 10.16257/j.cnki.1681-1070.2022.1202

• 封装、组装与测试 • 上一篇    下一篇

薄型塑封芯片钝化层损伤的失效分析与改进

张 波;李恭谨;秦 培   

  1. 汇顶科技股份有限公司,上海 201210
  • 收稿日期:2022-05-23 发布日期:2022-06-15
  • 作者简介:张 波(1992—),男,甘肃兰州人,硕士,工程师,主要从事封装开发与导入。

Failure Analysis and Improvement of Passivation Layer Damage of Thin Plastic Packaging Chip

ZHANG Bo, LI Gongjin, QIN Pei   

  1. Goodix Technology Co., Ltd., Shanghai 201210, China
  • Received:2022-05-23 Published:2022-06-15

摘要: 针对某薄型塑封产品试制中出现的开、短路问题,通过表面研磨、截面剖切、能谱分析等失效分析手段,确认了塑封料内无机填料颗粒损伤芯片钝化层的缺陷模式。从塑封材料的使用管控、塑封工艺参数改进及塑封料选型等角度对钝化层损伤问题进行了分析与验证。结果表明,合模压力的施加过程是影响芯片钝化层损伤的关键因素,采用215 kN的1段式合模压力设定可有效改善该缺陷,对薄型封装的塑封参数设定及材料选型提供了参考建议。

关键词: 薄型塑封, 钝化层损伤, 合模压力, 失效分析

Abstract: Aiming at the open and short circuit problem in the trial production of a thin plastic packaging product, the defect mode of passivation layer of the chip damaged by inorganic filler particles in the plastic packaging material is confirmed by means of surface lapping, cross-section cutting and energy spectrum analysis. The passivation layer damage is analyzed and verified from the perspectives of the use control of plastic packaging materials, and the improvement of plastic packaging process parameters and the selection of plastic packaging materials. The results show that the application process of mold closing pressure is the key factor affecting the damage of chip passivation layer. The defect can be effectively improved by keeping a steady 215 kN clamping pressure setting, which provides reference suggestions for the setting of molding parameters and material selection of thin plastic packaging.

Key words: thin plastic packaging, passivation layer damage, clamping force, failure analysis

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