基于Al2O3/NEA121堆叠薄膜的水氧阻隔性能研究

doi:10.16257/j.cnki.1681-1070.2022.0403

电子与封装 ›› 2022, Vol. 22 ›› Issue (4): 040201 . doi: 10.16257/j.cnki.1681-1070.2022.0403

基于Al₂O₃/NEA121堆叠薄膜的水氧阻隔性能研究

彭荣;杨振波;王珺

广州科技职业技术大学信息工程学院电气工程及自动化专业，广州

收稿日期:2021-07-15 出版日期:2022-04-25 发布日期:2021-10-20
作者简介:彭荣（1992—），女，江西吉安人，硕士，讲师，研究方向为OLED和薄膜封装。

Research on Water and Oxygen Barrier Performance Based on Al2O3/NEA121Encapsulation Film

PENG Rong, YANG Zhenbo, WANG Jun

School of Information Engineering, Electrical engineering and automation major,Guangzhou Vocational and Technical University of Science and Technology,Guangzhou 510000, China

Received:2021-07-15 Online:2022-04-25 Published:2021-10-20

摘要/Abstract

摘要： 薄膜封装是有机电致发光器件柔性化亟需解决的关键技术难题。用NEA121树脂与Al₂O₃作为薄膜封装的有机膜与无机膜封装，封装薄膜的水氧阻隔性能通过钙膜测试。实验结果表明，3层堆叠Al₂O₃/NEA121封装后的水汽透过率（WVTR）达到2.1×10^-4 g/(m²·day)，封装薄膜失效原因是水汽通过封装薄膜缺陷点渗透，不断腐蚀钙膜导致封装失效，而采用无机/有机堆叠封装的方法薄膜的封装效果得到了改善。

关键词: 薄膜封装, 无机／有机叠层薄膜, 水汽透过率, 原子层沉积, 旋涂

Abstract: Thin-film encapsulation is a key technical problem that needs to be solved urgently in the flexibility of organic electroluminescent devices. NEA121 resin and Al₂O₃ are used as thin-film encapsulated organic and inorganic films. The water and oxygen barrier properties of the encapsulated film are obtained through calcium film testing. The experimental results show that the water vapor transmission rate (WVTR) after the three-layer stack Al₂O₃/ NEA121 package reaches 2.1×10^-4 g/(m²·day), and the failure of the package film is caused by the penetration of water vapor through the defect points of the package film and continuous corrosion of calcium membrane results in failure of the package, and inorganic/ organic stacked package encapsulation thin film effect is improved.

Key words: filmencapsulation, inorganic/organiclaminatedfilm, watervaportransmissionrate, atomiclayerdeposition, spincoating

中图分类号:

彭荣;杨振波;王珺. 基于Al₂O₃/NEA121堆叠薄膜的水氧阻隔性能研究[J]. 电子与封装, 2022, 22(4): 040201 .

PENG Rong, YANG Zhenbo, WANG Jun. Research on Water and Oxygen Barrier Performance Based on Al2O3/NEA121Encapsulation Film[J]. Electronics & Packaging, 2022, 22(4): 040201 .

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中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

基于Al₂O₃/NEA121堆叠薄膜的水氧阻隔性能研究

Research on Water and Oxygen Barrier Performance Based on Al2O3/NEA121Encapsulation Film

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