纳米级数字集成电路老化效应分析与老化监测技术综述*

doi:10.16257/j.cnki.1681-1070.2020.1005

摘要/Abstract

摘要： ?数字集成电路随着工艺制程的提高，可靠性问题逐步凸显，而老化则是可靠性问题的一个重要方面。同时由于数字集成电路被广泛地应用于工业、汽车、航天等领域，对可靠性提出更高的要求，因此针对数字集成电路老化监测的技术成为了研究热点。对数字集成电路的老化效应进行了总结，并分析得出先进工艺下需要重点监测的老化效应，对数字集成电路现有老化监测手段进行总结分析，同时对老化监测技术的进一步发展提出了展望。

关键词: ?数字集成电路, 可靠性, 老化监测

Abstract: ?With the improvement of the process of digital integrated circuits, reliability problems gradually become prominent, and aging is an important aspect of reliability problems. At the same time, because digital integrated circuits are widely used in industrial, automotive, aerospace and other fields, reliability is higher required, so the technology for aging monitoring of digital integrated circuits has become a research hotspot. The review summarizes and analyzes the aging effects of digital integrated circuits and obtains the aging effects that require key monitoring under advanced technology, and summarizes and analyzes the existing aging monitoring methods of digital integrated circuits and provides further development of aging monitoring technology some opinions.

Key words: digital integratedcircuits, reliability, aging monitor

中图分类号:

TN406

赵天津;黄乐天;谢暄;魏敬和. 纳米级数字集成电路老化效应分析与老化监测技术综述^*[J]. 电子与封装, 2020, 20(10): 100101 .

ZHAO Tianjin, HUANG Letian, XIE Xuan,WEI Jinghe. NanometerDigital Integrated Circuit Aging Effect Analysis and Aging MonitoringTechnology Review[J]. Electronics & Packaging, 2020, 20(10): 100101 .

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中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

纳米级数字集成电路老化效应分析与老化监测技术综述^*

NanometerDigital Integrated Circuit Aging Effect Analysis and Aging MonitoringTechnology Review

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