基于硅外延片用石墨基座的温度均匀性研究

导航

冯永平;何文俊;任凯

Research on Temperature UniformityBased on Graphite Susceptor for Silicon Epitaxial Wafer

FENG Yongping, HE Wenjun, REN Kai

电子与封装 . 2022, (4): 40401 - . DOI: 10.16257/j.cnki.1681-1070.2022.0404