微波等离子体化学气相沉积法制备大尺寸单晶金刚石的研究进展*
牟草源;李根壮;谢文良;王启亮;吕宪义;李柳暗;邹广田
Research Progress in Preparation of Large Size Single Crystal Diamond byMicrowave Plasma Chemical Vapor Deposition
MU Caoyuan, LI Genzhuang, XIE Wenliang, WANG Qiliang, LYU Xianyi, LI Liu’an, ZOU Guangtian
电子与封装
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2023, (1): 10104
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DOI: 10.16257/j.cnki.1681-1070.2023.0023
