基于微纳科研平台工艺验证的微米级标准CMOS关键工艺仿真
王峥杰;徐丽萍;凌天宇;瞿敏妮;权雪玲;乌李瑛;程秀兰
Micron-Level Standard CMOS Key Process Simulation Based on Process Verification of Micro-Nano Scientific Research Platform
WANG Zhengjie, XU Liping,LING Tianyu, QU Minni, QUAN Xueling, WU Liying, CHENG Xiulan
电子与封装
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2023, (7): 70401
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DOI: 10.16257/j.cnki.1681-1070.2023.0087
