电偶腐蚀对先进封装铜蚀刻工艺的影响

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高晓义,陈益钢

Influence of Galvanic Corrosion on Copper Etching Process for Advanced Packaging

GAO Xiaoyi, CHEN Yigang

电子与封装 . 2023, (11): 110201 - . DOI: 10.16257/j.cnki.1681-1070.2023.0143