基于ASM E2000外延炉温控系统的电压校准研究
徐卫东;任凯;何晶;肖健;冯萍
Voltage Calibration Study Based on ASM E2000 Epitaxial Furnace Temperature Control System
XU Weidong, REN Kai,HE Jing, XIAO Jian, FENG Ping
电子与封装
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2024, (1): 10406
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DOI: 10.16257/j.cnki.1681-1070.2024.0014
