等离子增强化学气相沉积法低温生长SiOx薄膜的针孔缺陷修复
刘键1，胡跃明2，冷兴龙1，杜鹃2
Repair Technology of Pinhole Defect in SiOx Thin Films Grown at Low Temperature by Plasma Enhanced Chemical Vapor Deposition
LIU Jian1, HU Yueming2, LENG Xinglong1, DU Juan2
电子与封装
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2020, (1): 10301
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DOI: 10.16257/j.cnki.1681-1070.2020.0112
