铟镓砷与金属接触形貌异常分析和改进

中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

导航

铟镓砷与金属接触形貌异常分析和改进

武艳青，赵润，赵永林，宋红伟，于峰涛

Analysis and Improvement of the InGaAs-Metal Film Interface Abnormal Morphology

WU Yanqing, ZHAO Run, ZHAO Yonglin, SONG Hongwei, YU Fengtao

电子与封装 . 2019, (8): 31 -35 . DOI: 10.16257/j.cnki.1681-1070.2019.0809