浅沟槽隔离对MOSFET电学特性的影响
张海峰, 刘 芳, 陈燕宁, 原义栋, 付 振,
Influence of Shallow Trench Isolation on Electrics Characteristic in MOSFET
ZHANG Haifeng, LIU Fang, , CHEN Yanning, , YUAN Yidong, , FU Zhen,
电子与封装
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2019, (9): 43
-47
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DOI: 10.16257/j.cnki.1681-1070.2019.0911
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