NAND Flash浮栅干法蚀刻工艺优化解决数据写入失效

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陈　亮, 周朝锋, 李晓波

NAND Flash Floating Gate Dry Etch Technology Optimization to Tackle Program Failure

CHEN Liang, ZHOU Chaofeng, LI Xiaobo

电子与封装 . 2016, (7): 44 -47 . DOI: 10.16257/j.cnki.1681-1070.2016.0087