中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2024, Vol. 24 ›› Issue (5): 050402 . doi: 10.16257/j.cnki.1681-1070.2024.0055

• 材料、器件与工艺 • 上一篇    下一篇

基于GaN FET的窄脉冲激光驱动设计及集成

胡涛1,孟柘1,李锋1,蒋衍1,胡志宏1,2,刘汝卿1,袁野1,2,朱精果1   

  1. 1. 中国科学院微电子研究所,北京? 100029;2. 中国科学院大学,北京? 101408
  • 收稿日期:2023-09-19 出版日期:2024-05-27 发布日期:2024-05-27
  • 作者简介:胡涛(1979—),男,山东招远人,硕士,高级工程师,主要研究方向为光电子集成、光电系统封装。

Design and Integration of Narrow Pulse Laser Drive Based on GaN FET

HU Tao1, MENG Zhe1, LI Feng1, JIANG Yan1, HU Zhihong1,2, LIU Ruqing1, YUAN Ye1,2, ZHU Jingguo1   

  1. 1. Institute of Microelectronics of the Chinese Academyof Sciences, Beijing 100029, China; 2. University of Chinese Academy of Sciences, Beijing 101408, China
  • Received:2023-09-19 Online:2024-05-27 Published:2024-05-27

摘要: 激光雷达的整机性能与激光脉冲的驱动性能密切相关,现有的窄脉冲激光驱动设计主要基于Si基器件,具有较高的集成度,但很难获得更高峰值的功率输出,不能很好地匹配脉宽进一步缩窄的要求。从驱动理论出发,建立驱动电路模型,对寄生电感、器件封装、驱动布局等影响激光窄脉宽的因素进行分析,通过裸芯片封装、环路布局优化以及多层叉指结构等的设计,匹配GaN FET优良的开关特性,实现了上升时间为2.01 ns、脉宽为4.05 ns、重复频率为500 kHz、峰值功率为55 W的窄脉冲激光输出,波形质量较好,封装集成度提升50%以上,可为下一代高精度、远距离、阵列集成激光雷达系统的开发奠定基础。

关键词: 窄脉冲驱动, GaNFET, 激光雷达, 裸芯片封装, 分离式放电环路, 多层叉指结构

Abstract: The overall performance of LiDAR is closely related to the driving performance of the laser pulse, the existing narrow pulse laser drive design is mainly based on Si-based devices, which have a high degree of integration, but it is difficult to obtain a higher peak power output, and cannot well match the needs of further narrowing of the pulse width. Starting from the drive theory, the drive circuit model is established, the factors affecting the narrow pulse width of the laser, such as parasitic inductance, device packaging, and drive layout, are analyzed. Through the design of bare chip packaging, loop layout optimization, and multi-layer interdigital structure, matching the excellent switching characteristics of GaN FET, a narrow pulse laser output with a rise time of 2.01 ns, a pulse width of 4.05 ns, a repetition frequency of 500 kHz, and a peak power of 55 W is achieved, with good waveform quality, while the package integration can be improved by more than 50%, which can lay the foundation for the development of next-generation high-precision, long-range, array-integrated LiDAR system.

Key words: narrow pulse drive, GaN FET, LiDAR, bare chip packaging, split discharge loop, multi-layer interdigital structure

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