200 mm硅外延片时间雾的产生机理及管控方法研究
刘勇;仇光寅;邓雪华;杨 帆;金龙
Study on Generation Mechanism and Control Method of Time-DependentHaze on 200 mm Silicon Epitaxial Wafer
LIU Yong, QIU Guangyin, DENG Xuehua, YANG Fan, JIN Long
电子与封装
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2022, (7): 70402
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DOI: 10.16257/j.cnki.1681-1070.2022.0708
