一种用于生产的GaN HEMT器件空气桥的设计
石浩,王雯洁,付登源,梁宗文,王溯源,张良,章军云
Design of an Air Bridge for Fabrication of GaN HEMT Devices
SHI Hao, WANG Wenjie, FU Dengyuan, LIANG Zongwen, WANG Suyuan, ZHANG Liang, ZHANG Junyun
电子与封装
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2023, (9): 90403
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DOI: 10.16257/j.cnki.1681-1070.2023.0120
