ASM E2000硅外延片异常背圈现象研究与分析

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徐卫东;肖健;何晶;袁夫通

Research and Analysis of Abnormal Back-Ring Phenomena in ASM E2000 Silicon Epitaxial Wafers

XU Weidong, XIAO Jian, HE Jing, YUAN Futong

电子与封装 . 2024, (1): 10402 . DOI: 10.16257/j.cnki.1681-1070.2024.0005