大尺寸厚层硅外延片表面滑移线缺陷检验研究

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葛华,王银海,杨帆,尤晓杰

Study on Defect Inspection of Surface Slip Line on Large-Size Thick-Layer Silicon Epitaxial Wafers

GE Hua, WANG Yinhai, YANG Fan, YOU Xiaojie

电子与封装 . 2024, (7): 70403 . DOI: 10.16257/j.cnki.1681-1070.2024.0073