基于SECS/GEM协议的芯片烘箱设备智能故障诊断算法设计*
梁达平,赵玉祥,张进兵
Design of Intelligent Fault Diagnosis Algorithm for Chip Oven Equipment Based on SECS/GEM Protocol
LIANG Daping, ZHAO Yuxiang, ZHANG Jinbing
电子与封装
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2024, (7): 70501
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DOI: 10.16257/j.cnki.1681-1070.2024.0071
