MEMS器件辐射损伤机理与抗辐射加固技术研究进展*
郭凯茜，朱志成，徐东航，聂萌
Advances in Radiation Damage Mechanisms and Radiation-Hardening Technologies for MEMS Devices
GUO Kaixi, ZHU Zhicheng, XU Donghang, NIE Meng
电子与封装
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2025, (11): 110102
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DOI: 10.16257/j.cnki.1681-1070.2025.0176
