高温MEMS压力传感器芯片设计与实现方法研究*
陈培仓，华传洋，朱赛宁，王涛，聂萌，郭贤，吴建伟
Research on Design and Implementation Methods of High-Temperature MEMS Pressure Sensor Chips
CHEN Peicang, HUA Chuanyang, ZHU Saining, WANG Tao, NIE Meng, GUO Xian, WU Jianwei
电子与封装
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2025, (11): 110103
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DOI: 10.16257/j.cnki.1681-1070.2025.0177
