耐高温MEMS加速度计设计及温度特性优化
陈鹏旭，任臣，杨拥军，王宁，陈琳，李明昊
Design and Temperature Characteristics Optimization of a High-Temperature Resistant MEMS Accelerometer
CHEN Pengxu, REN Chen, YANG Yongjun, WANG Ning, CHEN Lin, LI Minghao
电子与封装
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2025, (11): 110104
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DOI: 10.16257/j.cnki.1681-1070.2025.0178
