关键词: 等离子清洗, 射频, DC/DC混合电路, 可靠性

Abstract: Plasma cleaning is a kind of dry cleaning technology widely used in the field of electronic packaging. This paper summarizes the application of RF plasma cleaning technology in the assembly process of DC/DC hybrid circuit and finds that RF plasma cleaning can effectively improves the assembly quality and reliability of DC/DC hybrid circuit , but improper cleaning process can decrease them. Some preventive measures are put forward to solve the problems existing in RF plasma cleaning process.

Key words: plasma cleaning, radio frequency, DC/DC hybrid circuit, reliability