多晶硅表面前处理对嵌入式闪存器件寄生电阻的减小
赵江1,2，顾培楼1，张雷1，陈珏1，奚晟蓉1
Poly Surface Pre-clean for Parasitic Resistance Reduction in 0.13 μm Embedded Flash
ZHAO Jiang1,2,GU Peilou1,ZHANG Lei1,CHEN Jue1,XI Shengrong1
电子与封装
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2018, (3): 36
-39
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DOI: 10.16257/j.cnki.1681-1070.2018.0032
