集成微系统多物理场耦合效应仿真关键技术综述*
张鹏, 孙晓冬, 朱家和, 王晶, 王大伟, 赵文生
Review on Multiphysics Coupling SimulationProgresses in Integrated Micro-System
ZHANG Peng, SUN Xiaodong, ZHU Jiahe, WANG Jing, WANG Dawei, ZHAO Wensheng
电子与封装
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2021, (10): 100104
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DOI: 10.16257/j.cnki.1681-1070.2021.1004
