基于立体视觉的IGBT针高检测

doi:10.16257/j.cnki.1681-1070.2023.0136

电子与封装 ›› 2023, Vol. 23 ›› Issue (10): 100206 . doi: 10.16257/j.cnki.1681-1070.2023.0136

基于立体视觉的IGBT针高检测

田文超^1,2,田明方²,庄章龙³,赵静榕³

1.西安电子科技大学机电工程学院，西安 710068；2.西安电子科技大学杭州研究院，杭州 310018；3.上海轩田工业设备有限公司，上海 201109

收稿日期:2023-05-08 出版日期:2023-10-31 发布日期:2023-10-31
作者简介:田文超（1968—），男，江苏无锡人，教授，博士生导师，主要研究方向为电子封装、高密度组装和微机电技术。

Height Inspection of IGBT Pins Based on Stereovision

TIAN Wenchao^1,2, TIAN Mingfang², ZHUANG Zhanglong³,ZHAO Jingrong³

1. School of Mechano-Electronic Engineering,XidianUniversity, Xi'an 710068, China;2. Hangzhou Instituteof Technology, Xidian University, Hangzhou 310018, China;3.Shanghai SharetekTechnology Co.,Ltd., Shanghai 201109, China

Received:2023-05-08 Online:2023-10-31 Published:2023-10-31

摘要/Abstract

摘要： 针对现有绝缘栅双极晶体管（IGBT）的pin针高度测量系统不能稳定、可靠地测量pin针高度的问题，设计了一套基于双线激光传感器的pin针高度测量系统。双线激光传感器采用上下错高的安装布局，分别采集IGBT针尖部分和底面部分的点云数据。同时，基于双线激光传感器采集的点云数据开发了一套测量pin针高度的测量程序。分别使用随机抽样一致性（RANSAC）算法处理基准面点集的离群点，使用多步去噪算法处理精确点集。实验结果表明，该系统的测量重复度小于0.04mm，且极差分布在（0.021 mm，0.039 mm）的概率超过99.7%，有着良好的稳定性和可靠性。

关键词: 双线激光传感器, 分区域点云采集, 平面拟合去噪, 针高度测量, 立体视觉

Abstract: Aiming at the problem that existing pin-height measurement system for insulated gate bipolar transistors (IGBTs) cannot measure the pin-height stably and reliably, a pin-height measurement system based on a dual-line laser sensor is designed.The dual-line laser sensor adopts anup and down staggered- height mounting layout to collect point cloud data from the tip part and the bottom part of the IGBT pinneedlesrespectively.At the same time, a measurement programfor pin-height measurementis developed based on point cloud data collected by the dual-line laser sensor. The outliers in the datum point set are treated using the randomised sampling consistency (RANSAC) algorithm and the exact point set is treated using a multi-step denoising algorithm respectively.The experimental results show that the measurement repeatability of the system is less than 0.04 mm, and the probability of the polar distribution at (0.021 mm, 0.039 mm) is more than 99.7%. The system has good stability and reliability.

Key words: dual-line laser sensors, sub-areapoint cloud acquisition, planar fitting denoising, pin-height measurement, stereovision

中图分类号:

TN307

田文超,田明方,庄章龙,赵静榕. 基于立体视觉的IGBT针高检测[J]. 电子与封装, 2023, 23(10): 100206 .

TIAN Wenchao, TIAN Mingfang, ZHUANG Zhanglong,ZHAO Jingrong. Height Inspection of IGBT Pins Based on Stereovision[J]. Electronics & Packaging, 2023, 23(10): 100206 .

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田明方（1998—），男，贵州铜仁人，硕士研究生，主要研究方向为电子封装技术与可靠性检测。

中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

基于立体视觉的IGBT针高检测

Height Inspection of IGBT Pins Based on Stereovision

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