中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2017, Vol. 17 ›› Issue (12): 1 -4. doi: 10.16257/j.cnki.1681-1070.2017.0138

• 封装、组装与测试 •    下一篇

一种半导体探测器气密性封装结构和工艺优化

丁荣峥1,马国荣2,张玲玲3,邵 康4   

  1. 1.中国电子科技集团公司第五十八研究所,江苏 无锡 214072;2.无锡天和电子有限公司,江苏 无锡 214024;3.无锡华普微电子有限公司,江苏 无锡 214035;4.江苏省宜兴电子器件总厂有限公司,江苏 宜兴 214221
  • 收稿日期:2017-11-03 出版日期:2017-12-20 发布日期:2017-12-20
  • 作者简介:丁荣峥(1967—),男,江苏兴化人,1991年毕业于长春光学精密机械学院,研究员级高级工程师,主要从事集成电路封装设计、封装工艺技术开发、封装失效分析及可靠性、标准化等工作。

The Hermetic Package Structure and Packaging Process Optimization of a Semiconductor Detector

DING Rongzheng1,MA Guorong2,ZHANG Lingling3,SHAO Kang4   

  1. 1.China Electronics Technology Group Corporation No.58 Research Institute,Wuxi 214072,China;2.Wuxi TianHe Electronics Co.,Ltd.,Wuxi 214024,China;3.Wuxi Hope Micro Electronics Co.,Ltd.,Wuxi 214035,China;4.Jiangsu Province Yixing Electronic Device General Factory Co.,Ltd.,Yixing 214221,China
  • Received:2017-11-03 Online:2017-12-20 Published:2017-12-20

摘要: 结构和工艺设计优化已经成为封装必不可少的步骤。随着探测器封装尺寸越来越小以及可靠性要求的不断提高,气密性封装结构向表面贴装、超薄型、芯片与封装体面积比更高的方向转变,封装结构和封装工艺的设计成为可靠性、成品率和成本的关键。骑跨式贴片半导体辐射探测器陶瓷封装中,存在芯片粘接衬底、密封环、引脚与HTCC陶瓷件钎焊处有Ag72Cu28焊料堆积、爬行的现象,以及芯片的Au80Sn20焊接层存在空洞大而又无法通过X射线照相或芯片粘接的超声检测来筛选剔除不合格的问题,分析原因并通过优化封装结构、改进封装工艺等解决封装的质量和可靠性。实际生产结果表明,结构优化、工艺改进有效地简化了外壳结构,减少了制造工序步骤,并提高了芯片烧结质量和成品率,降低了封装成本。

关键词: 一体化引线, 合金烧结, 封装结构, 封装工艺

Abstract: Optimization of structure and process design has become an indispensable step in packaging.With the detector size of the package is more and more small,reliability requirements continue to increase,the hermetic package to the surface mount,ultra-thin,chip and package area ratio higher conversion,package structure and packaging process design Become the key to reliability,yield and cost.To ride a straddle patch semiconductor radiation detectors in the package,there are the die bonding substrate,sealing ring,pin and ceramic pieces had Ag72Cu28 brazing solder accumulation,crawling,and die Au80Sn20 welding layer holes bigand given to filter through Radiographyor Ultrasonic Inspection weed out the unqualified products,analysis the reason and by optimizing the structure,improve the packaging process to solve the quality and reliability.The actual production results show that the structure optimization and process improvement effectivelysimplify the shell structure and reduce the manufacturing process steps,and improve the chip sintering quality and yield,reduce the cost.

Key words: pin integration, alloy soldering, package structure, packaging process

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