中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2019, Vol. 19 ›› Issue (9): 05 -9. doi: 10.16257/j.cnki.1681-1070.2019.0902

• 封装、组装与测试 • 上一篇    下一篇

热学环境下2.5D封装器件60Pb40Sn互连焊点可靠性研究

文惠东,张代刚,刘建松,徐士猛   

  1. 北京微电子技术研究所,北京100076
  • 收稿日期:2019-05-20 出版日期:2019-09-20 发布日期:2019-09-20
  • 作者简介:文惠东(1988—),男,工程师,主要研究方向为微电子封装。

Study on 60Pb40Sn Solder Joints Reliability of 2.5D Package Device in Thermal Environment

WEN Huidong, ZHANG Daigang, LIU Jiansong, XU Shimeng   

  1. Beijing Microelectronics Technology Institution, Beijing 100076, China
  • Received:2019-05-20 Online:2019-09-20 Published:2019-09-20

摘要: 2.5D封装具有信号传输快、封装密度高等特点,广泛应用于高性能集成电路封装工艺中。目前2.5D器件在互连焊点方面通常采用无铅焊料,不满足宇航用器件含铅量不低于3%的要求。本文采用60Pb40Sn焊料作为2.5D封装器件中硅转接基板与上层芯片之间互连焊点,评估了60Pb40Sn焊点的互连可靠性,结果显示器件在1000次-65℃~150℃温度循环、1000 h 150℃稳定性烘焙、500次-65℃~150℃热冲击后互连合格,初步证实了60Pb40Sn焊料在2.5D封装器件应用的可行性。

关键词: 2.5D封装, 含铅焊点, 可靠性

Abstract: 2.5D package technology has been widely used in high-performance IC due to its characteristics of fast signal transmission speed and high package density. At present, lead-free solder are usually adopt as joints in 2.5D device, which don’t meet the requirement that content of Pb in solder joints of spaceborne device should be more than 3%. In this paper, 60Pb40Sn were used as micro-solder between silicon interposer and upper chip in 2.5D package device, and reliability of 60Pb40Sn solder joints was assessed. The main conclusion is that the daisy devices passed continuity tests after 1000 temperature cycles(-65℃~150℃), 1000 hours of stabilization bake(150℃) and 500 thermal shocks(-65℃~150℃), which tentatively verified the feasibility of 60Pb40Sn solder in 2.5D package device.

Key words: 2.5D package, leaded solder joint, reliability assessment

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