关键词: 参数设置, 曝光效果, 筛选

Abstract: Manufacturing rule check (MRC), it refers to a rule check on the final plate making graphics after the mask data processing, and the graphics that do not meet the manufacturing specifications are caught according to the set manufacturing rules. Data processing personnel need to manually screen the captured graphics and then provide the related information to customers. Usually, due to the large number of graphics, MRC operation and manual screening will take a lot of time. The parameter setting of manufacturability rule checking is studied, through the comparative experiment of the influence of parameter setting on MRC graph capture and running time, it is verified that parameter setting can reduce MRC running time and the number of captured graphs. And through the experimental research on the graph effect after adding the modified parameters, it is verified that the burr and other MRC graphs do not produce real effect graphic effect, which can be ignored. Finally, the overall timeliness of MRC inspection operation and screening can be improved.

Key words: parametersetting, exposureeffect, screening