中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2023, Vol. 23 ›› Issue (6): 060205 . doi: 10.16257/j.cnki.1681-1070.2023.0079

• 封装、组装与测试 • 上一篇    下一篇

DBC铜线键合工艺参数研究

王小钰1.2;张茹1;李海新2   

  1. 1. 烟台台芯电子科技有限公司,山东 烟台 260046;2.哈尔滨工程大学烟台研究院,山东 烟台 264000
  • 收稿日期:2022-11-29 发布日期:2023-04-23
  • 作者简介:王小钰(1998—),女,陕西商洛人,硕士,现从事IGBT电子封装相关工作。

Study on Bonding Parameters of Copper Wire on DBC Substrate

WANG Xiaoyu1,2, ZHANG Ru1, LI Haixin2   

  1. 1.Yantai Taixin Electronics Technology Co., Ltd., Yantai 260046, China; 2. Harbin Engineering UniversityYantai Research Institute, Yantai 264000, China
  • Received:2022-11-29 Published:2023-04-23

摘要: 铜线作为最有发展潜力的新一代键合材料,与铝线相比,具有优异的导电及导热能力。因绝缘栅双极型晶体管(IGBT)需承载大电流,采用铜线可在键合线数量不变的基础上提高电流传输能力和散热能力。采用铜线超声楔形键合对陶瓷覆铜基板第一键合点和第二键合点的键合工艺参数进行研究,以剪切力作为衡量键合质量的方法,采用单因素分析法研究各参数对键合点强度的影响,采用正交试验确定最佳工艺参数,为铜线键合工艺的参数设定提供参考及指导方法。

关键词: 铜线, 超声键合, 楔形键合, 正交试验

Abstract: Copper wire as the most promising new generation bonding material has excellent electrical and thermal conductivity compared with aluminum wire. Because insulated gate bipolar transistors (IGBTs)need to carry large current, copper wire can be used to improve the current transmission and heat dissipation while maintaining the same number of bonding wires. The bonding process parameters of the first and second bonding points of ceramic copper clad substrate are studied by using copper wire ultrasonic wedge bonding. The shear force is used as the method to measure the bonding quality, and the single factor analysis method is used to study the influence of each parameter on the bonding strength. The optimum process parameters are determined by orthogonal test. It provides a reference and guidance method for parameter setting of copper wire bonding process.

Key words: copper wire, ultrasonic bonding, wedge bonding, orthogonal test

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