中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2021, Vol. 21 ›› Issue (5): 050207 . doi: 10.16257/j.cnki.1681-1070.2021.0515

• 封装、组装与测试 • 上一篇    下一篇

高温共烧陶瓷外壳金属化层粘附强度测试方法及其优化

丁荣峥1;邵康2;汤明川2;史丽英2   

  1. 1.中科芯集成电路有限公司,江苏 无锡 214072;2. 江苏省宜兴电子器件总厂有限公司,江苏 无锡 214221
  • 收稿日期:2020-12-02 出版日期:2021-05-18 发布日期:2021-01-25
  • 作者简介:丁荣峥(1967—),男,江苏兴化人,研究员级高级工程师,主要从事集成电路封装设计、封装工艺技术开发、测试、封装失效分析及可靠性、标准化等工作。

Analysis and Optimization of Test Method forAdhesion Strength of Metallized Layer of HTCC

DING Rongzheng1, SHAO Kang2,TANG Mingchuan2, SHI Liying2   

  1. 1.China Key System & Integrated CircuitCo., Ltd., Wuxi 214072, China;
  • Received:2020-12-02 Online:2021-05-18 Published:2021-01-25

摘要: 陶瓷外壳、基板、绝缘子等的表面金属化层的粘附强度测试方法有多个标准,且这些标准并不等同,如何正确使用标准并没有明确规定或说明。分析了高温共烧陶瓷外壳金属化层在典型应用情况下的作用,及其与测试方法的关系,提出了高温共烧陶瓷外壳金属化层测试方法、测试注意事项,并做了验证试验,优化的测试方法可更准确地对陶瓷上金属化层粘附强度进行评测。

关键词: 金属化, 粘附强度, 测试方法, 陶瓷外壳

Abstract: There are distinct testing methods of adhesion strength about surface metallized layers attached to ceramic packages, ceramic substrates and ceramic insulators. The testing instructions for these standards are inadequate. This paper analyzes the HTCC packages through the following ways: the function in typical situation, the test method and the evaluation standards. Furthermore, the paper puts forward the testing method selection of HTCC metallized layer and the matters required attention during testing. Based on this theory, the optimized testing method can provide an accurate evaluation for the quality of ceramic metallized layer.

Key words: metallization, adhesionstrength, testmethod, ceramicpackage

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