中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2017, Vol. 17 ›› Issue (7): 8 -10. doi: 10.16257/j.cnki.1681-1070.2017.0082

• 封装、组装与测试 • 上一篇    下一篇

长寿命抗干扰测试针在SOT363半导体高频器件测量中的应用

唐明津,陈伟,陈新   

  1. 英飞凌(无锡)科技有限公司,江苏 无锡 214028
  • 出版日期:2017-07-20 发布日期:2017-07-20
  • 作者简介:唐明津(1955—),男,马来西亚人,本科,资深高级工程师,现任职于英飞凌(无锡)科技有限公司,主要负责改进和研发新型半导体测试技术和测试设备。

Application of Long-Life and Anti-Interference Contact Finger for High-Frequency SOT363 Semiconductor Device Measurement

TANG Mingching, CHEN Wei, CHEN Xin   

  1. Infineon Technologies (Wuxi) Co., Wuxi 214028, China
  • Online:2017-07-20 Published:2017-07-20

摘要: 在半导体器件生产企业中,使用测试针接触器件的引脚进行电参数测量,必须考虑两个问题。一个问题是降低测试针与器件引脚间的接触电阻。在自动化生产线中,企业要想得到高精度的测量值,必须经常替换已磨损的测试针,才能获得更高的成品率。另一个问题是降低外部信噪对半导体高频器件(工作频率>2 GHz)HFE参数测量的影响。外部信噪会使高频器件的HFE参数不稳定,造成成品率的降低。通过SOT363测试针设计实例,介绍了新型长寿命抗干扰测试针的设计方法。

关键词: 长寿命抗干扰测试针, 高频器件, 成品率

Abstract: During semiconductor test measurements, the contact finger is one of the mAin contributors to high accuracy and precision. Two concerns must be focused to design a good test contact finger. One is good kelvin test contact at test device lead pad, another is test interference from external electrical noise for high frequency (HF) SOT device (>2 GHz). To achieve a high precision test measurement in auto mAtic production line, frequent replacement of the worn-out test contact fingers should be performed to sustain good test yield. Another concern is high frequency devices facing HFE test oscillation and causing yield loss. To solve these issues, a new design of long life test contact fingers and high consideration of anti-oscillation/anti-electrical noise design must be developed. In the paper, the new design method of long life span and anti-interference test contact finger is introduced via SOT363 test contact finger.

Key words: long-life and anti-interference contact finger, high frequency devices, yield

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