中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2018, Vol. 18 ›› Issue (7): 45 -48. doi: 10.16257/j.cnki.1681-1070.2018.0081

• 微电子制造与可靠性 • 上一篇    

MOS栅控晶闸管在超高di/dt应用中的失效分析

刘亚伟,陈万军   

  1. 电子科技大学电子薄膜与集成器件国家重点实验室,成都 610054
  • 出版日期:2018-07-20 发布日期:2020-02-21
  • 作者简介:刘亚伟(1991—),男,河南商丘人,电子科技大学硕士研究生,研究方向为新型功率半导体器件与集成电路和系统。

Failure Analysis of MOS-Controlled Thyristor in Ultra-high Di/Dt Application

LIU Yawei, CHEN Wanjun   

  1. State Key Laboratory of Electronic Thin Film and Integrated Devices,UESTC, Chengdu 610054, China
  • Online:2018-07-20 Published:2020-02-21

摘要: MOS栅控晶闸管(MCT)以其极低的导通压降、简单的栅极驱动电路被广泛应用于脉冲领域。但在超高di/dt条件下进行脉冲放电时,MCT极易因栅氧化层损坏而发生失效。针对MCT在超高di/dt脉冲放电过程中存在的栅极失效问题进行研究,通过仿真和实验分析了di/dt较大的条件下,阴极电感对栅极和阴极之间电势差的影响。研究表明,MCT阴极电感不仅会影响脉冲放电回路的电流峰值及di/dt,还会造成器件阴极电势震荡,使栅极与阴极之间产生极高的电势差,进而造成栅氧化层因过压而损坏。通过分析器件失效机理,建立了脉冲放电过程中栅极与阴极电势差的数学模型。基于该模型,通过减小阴极电感及适当增大栅极串联电阻的方式提高了MCT在脉冲放电过程中的可靠性。

关键词: MOS栅控晶闸管, 脉冲放电, 栅极损伤, 阴极电感, 栅极串联电阻

Abstract: MOS-controlled thyristor is widely used in pulse field due to its extremely low on-state voltage drop and simple gate driving circuit. However, during the pulse discharge process, failure of MCT can be easily observed due to the damage of gate oxide layer. In this work, study of MCT gate failure during the pulse discharge process with extremely high di/dt is carried out, and the impact of cathode inductance on the potential difference between gate and cathode electrode is analyzed via simulation and experiment. Corresponding researches show that cathode inductance not only affects the magnitude of peak current and di/dt in pulse discharge loop, but also causes the cathode potential shock, which generates an extremely high potential difference between gate and cathode electrode and causes the damage of gate oxide layer due to overvoltage. In this work, by analyzing the failure mechanism of MCT, mathematic model of gate-cathode potential difference is established. Based on this model, the reliability of MCT in pulse discharge application is improved by reducing the cathode inductance and appropriately increasing the gate resistance.

Key words: MOS-controlled thyristor, pulse discharge, gate damage, cathode inductance, gate resistance

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