中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2020, Vol. 20 ›› Issue (5): 050202 . doi: 10.16257/j.cnki.1681-1070.2020.0503

• 封装、组装与测试 • 上一篇    下一篇

芯片真空金锡共晶焊接中的气压控制

洪火锋   

  1. 中科迪高微波系统有限公司,安徽 芜湖 241002
  • 出版日期:2020-05-25 发布日期:2020-03-04
  • 作者简介:洪火锋(1983—),男,安徽芜湖人,硕士,毕业于安徽大学,工程师,主要研究方向为混合集成电路、微波固态电路、微组装、封装等。

Atmosphere Pressure Control in Vacuum Gold Tin Eutectic Soldering of Chip

HONG Huofeng   

  1. Sino-Tekco Microwave System Co., Ltd., Wuhu 241002, China
  • Online:2020-05-25 Published:2020-03-04

摘要: 真空共晶焊接是用真空共晶炉实现芯片与载体互连的一种重要的焊接工艺。对于需要共晶的芯片,其与载体间共晶焊接的空洞率,会直接影响到芯片工作时的散热及其输出功率。重点针对无工装施加压力条件下真空共晶炉内抽真空、加压、泄压等工艺展开试验研究,分析不同的炉内气压压强与空洞率之间的关系。试验结果表明,在焊料熔化形成空洞时增加气压、在焊料凝固后排气降压,对降低焊接空洞率有明显改善。

关键词: 共晶焊接, 真空, 气体压强, 空洞

Abstract: Vacuum eutectic soldering is an important technology and process to realize the interconnection between die and carrier. For the chip that needs eutectic, the void ratio of eutectic soldering between the chip and the carrier will directly affect the heat dissipation and output power when the chip is working. In the process of vacuum eutectic soldering, without tooling pressure, the relationship between atmosphere pressure and void rate is analyzed by using vacuum eutectic furnace. It is found that in the vacuum soldering process, pressure is applied after solder melting and forming voids, and pressure is released after solder solidification, which can significantly reduce the void rate.

Key words: eutectic soldering, vacuum, gas pressure, void

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