柔性有机发光二极管的薄膜封装研究进展*

doi:10.16257/j.cnki.1681-1070.2023.0086

摘要/Abstract

摘要： 柔性有机发光二极管（OLED）因使用柔性衬底而对环境中的水氧更加敏感，这对封装技术提出了更高的要求。目前，柔性OLED封装技术中最具希望的发展方向是可柔性化、水氧隔离能力优异的薄膜封装（TFE）技术。TFE是在OLED表面制备一层或者多层超薄的薄膜材料，以阻隔水氧侵蚀的封装技术，其关键在于制备水氧隔离能力优异的薄膜并避免对OLED器件性能产生影响。介绍了柔性OLED的衬底选择和传统的刚性封装技术，阐明了TFE的优势，并通过无机/有机薄膜的制备及TFE采用的在线封装和离线封装2种方法，对柔性TFE的发展现状进行了总结，并对柔性TFE的发展做出了展望。

关键词: 有机发光二极管, 柔性, 薄膜封装, 水氧透过率, 稳定性

Abstract: Flexible organic light-emitting diodes (OLEDs) are more sensitive to water and oxygen in the environment due to the use of flexible substrates, which places higher demands on the encapsulation technology. Currently, the most promising development direction of flexible OLEDs encapsulation technology is the thin film encapsulation (TFE) technology with flexibility and excellent water-oxygen isolation. TFE is an encapsulation technology that fabricates one layer or multiple layers of thin film on the surface of OLEDs to block the water-oxygen erosion. The key to TFE is fabricating films with excellent water-oxygen barrier and avoiding the impact on OLED performance. The substrate selection of flexible OLEDs and the traditional rigid encapsulation technology are introduced to elucidate the advantages of TFE. By reviewing the manufacturing processes of inorganic/organic films and the two methods of online and offline encapsulation used for TFE, the current status of the development of flexible TFE is summarized and the future development of flexible TFE is prospected.

Key words: organic light-emitting devices, flexibility, thin film encapsulation, water-oxygen transmission rate, stability

中图分类号:

TN383.1

周钰卜;高桦宇;郑华;邹建华;林生晃;李显博;刘佰全. 柔性有机发光二极管的薄膜封装研究进展^*[J]. 电子与封装, 2023, 23(7): 070203 .

ZHOU Yubu, GAO Huayu, ZHENG Hua, ZOU Jianhua, LINShenghuang, LI Xianbo, LIU Baiquan. Research on Thin Film Encapsulation of Flexible Organic Light-Emitting Diodes[J]. Electronics & Packaging, 2023, 23(7): 070203 .

参考文献

[1] TANG C W, VANSLYKE S A. Organic electroluminescent diodes[J]. Applied Physics Letters, 1987, 51: 913-915.
[2] BURROUGHES JH,BRADLEY D D C, BROWN A R, et al. Light-emitting diodes based on conjugated polymers[J]. Nature, 1990, 347, 539-541.
[3] 程亮，赵子龙. 用于OLED驱动电路的振荡器设计[J]. 电子与封装，2019, 19(4), 24-27.
[4] 刘佰全，高栋雨，王剑斌，等. 白光有机发光二极管的研究进展[J]. 物理化学学报，2015, 31(10), 1823-1852.
[5] Ni H z, Li M, Li X h, et al. Hysteresis suppression of carbon nanotube thin-film transistor using laminated HfO?/Al?O? by ALD[J]. IEEE Transactions on Electron Devices, 2022, 69(3): 1069-1076.
[6] Li M, Xu M, Zou J h, et al. Realization of Al2O3/MgO laminated structure at low temperature for thin film encapsulation in organic light-emitting diodes[J]. Nanotechnology, 2016, 27(49): 494003.
[7] Li M, Gao D y, Li S, et al. Realization of highly-dense Al2O3 gas barrier for top-emitting organic light-emitting diodes by atomic layer deposition[J]. RSC advances, 2015, 5(127): 104613-104620.
[8] 周忠伟，李民，徐苗，等. 原子层沉积方法制备低温多层Al2O3/TiO2复合封装薄膜的研究[J]. 液晶与显示, 2016, 31(6): 532-539.
[9] Wang L, Ruan C p, Li M, et al. Enhanced moisture barrier performance for ALD-encapsulated OLEDs by introducing an organic protective layer[J]. Journal of Materials Chemistry C, 2017, 5(16): 4017-4024.
[10] Liu B q, Wang L, Xu M, et al. Extremely stable-color flexible white organic light-emitting diodes with efficiency exceeding 100 lm W-1[J]. Journal of Materials Chemistry C, 2014, 2(46): 9836-9841.
[11] YOON K, KIM H, HAN K, et al. Extremely high barrier performance of organic-inorganic nano-laminated thin films for organic light-emitting diodes[J]. ACS Applied Material & Interfaces, 2017, 9(6), 5399-5408.
[12] MIRVAKILI M, BUI H, OMMEN J, et al. Enhanced barrier performance of engineered paper by atomic layer deposited Al2O3 thin films[J]. ACS Applied Materials & Interfaces, 2016, 8(21), 13590-13600.
[13] PARK J, SETHA J, CHOB S, et al. Hybrid multilayered films comprising organic monolayers and inorganic nanolayers for excellent flexible encapsulation films[J]. Applied Surface Science, 2020, 3(24): 6359-6366.
[14] Liu B q, Luo D x, Gao D y, et al. An ideal host-guest system to accomplish high-performance greenish yellow and hybrid white organic light-emitting diodes[J]. Organic Electronics, 2015, 27(12): 29-34.
[15] Luo D x, Chen Q z, Liu B q, et al. Emergence of flexible white organic light-emitting diodes[J]. Polymers, 2019, 11(2): 384.
[16] Gustafsson G, Cao Y, Treacy G, et al. Flexible light-emitting diodes made from soluble conducting polymers[J]. Nature, 1992, 357(6378): 477-479.
[17] Wang Z B, Helander M G, Qiu J, et al. Unlocking the full potential of organic light-emitting diodes on flexible plastic[J]. Nature Photonics, 2011, 5(12): 753-757.
[18] Yuan H, Li Q, Yan W q, et al. A novel and efficient technology of depositing Al2O3 film for OLEDs thin film encapsulation[J]. Vacuum, 2022, 196: 110741.
[19] Jeon Y, Lee H, Kim H, et al. A review of various attempts on multi-functional encapsulation technologies for the reliability of OLEDs[J]. Micromachines, 2022, 13(9): 1478.
[20] Park Y, Kim T, Shim H, et al. A highly bendable thin film encapsulation by the modulation of thermally induced interfacial residual stress[J]. Applied Surface Science, 2022: 153874.
[21] 彭荣. 基于OLED器件的封装方法研究[J]. 电子与封装, 2020, 20(5):050101.
[22] MEYER J, G?rrn P, Bertram F, S. et al. Al2O3/ZrO2 nanolaminates as ultrahigh gas-diffusion barriers?a strategy for reliable encapsulation of organic electronics[J]. Advanced Materials, 2009, 21(18), 1845-1849.
[23] Meyer J, Schmidt H, Kowalsky W, et al, The origin of low water vapor transmission rates through Al2O3/ZrO2 nanolaminate gas-diffusion barriers grown by atomic layer deposition[J].Applied Physics Letters, 2010, 96(24): 243308.
[24] Singh A, Klumbies H, Schr?der U, et al. Barrier performance optimization of atomic layer deposited diffusion barriers for organic light emitting diodes using x-ray reflectivity investigations[J]. Applied Physics Letters, 2013, 103(23): 233302.
[25] Lee L, Yoon K, Jung J, et al. Ultra gas-proof polymer hybrid thin layer[J]. Nano Letters, 2018, 18(9): 5461-5466.
[26] Yang Y Q, Duan Y, Chen P, et al. Realization of thin film encapsulation by atomic layer deposition of Al2O3 at low temperature[J]. The Journal of Physical Chemistry C, 2013, 117(39): 20308-20312.
[27] Duan Y, Sun F B, Yang Y Q, et al. Thin-film barrier performance of zirconium oxide using the low-temperature atomic layer deposition method[J]. ACS Applied Materials & Interfaces, 2014, 6(6): 3799-3804.
[28] Affinito J, Gross M, Coronado C, et al. A new method for fabricating transparent barrier layers[J]. Thin Solid Films, 1996, 290-291: 63-67.
[29] Weijer P, Bouten P, Unnikrishnan S, et al. High-performance thin-film encapsulation for organic light-emitting diodes[J]. Organic Electronics, 2017, 44: 94-98.
[30] 张方晖，席俭飞，王秀峰. 硫系玻璃薄膜封装层对OLED寿命的影响[J]. 半导体光电, 2010, 31(1):30-33.
[31] Sun H Y, Lau K M, Lau K C, et al. Fluorocarbon film as cathode protective coating in organic light-emitting devices[J]. Applied Physics Letters, 2006, 88(22): 223503.
[32] Jeong J, Kim H, Yi M S. Effect of Ag interlayer on the optical and passivation properties of flexible and transparent Al2O3∕Ag∕Al2O3 multilayer[J]. Applied Physics Letters, 2008, 93(3): 033301.
[33] Park K, Ryu M, Oh H, et al. Double-layered passivation film structure of Al2O3/SiNx for high mobility oxide thin film transistors[J]. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 2013, 31(2): 020601.
[34] 赵准永，李海衍，印闰京. 显示面板与电子设备: CN115701764A[P]. 2023-02-10.
[35]李庚禧，李美禾. 显示设备: CN115701253A[P]. 2023-02-07.
[36] 杨中国. OLED显示面板的封装盖板及OLED显示面板的封装方法: CN112310309A[P]. 2023-01-20.
[37] Cho A, Kim E, Park S, et al. Flexible OLED encapsulated with gas barrier film and adhesive gasket[J]. Synthetic metals, 2014, 193: 77-80.
[38] Kim S, Lee K, Sahu B, et al. Flexible OLED fabrication with ITO thin film on polymer substrate[J]. Japanese Journal of Applied Physics, 2015, 54(9): 090301.
[39] 李会录，南峰，李东辉，等. 有机电致发光显示器用框胶封装材料的研制[J]. 中国胶粘剂, 2010, 19(11): 45-48.
[40] 陈维斌. OLED封装用高性能阻隔胶粘带的研制[J]. 广东化工2017, 44(21): 48-49.

中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

柔性有机发光二极管的薄膜封装研究进展^*

Research on Thin Film Encapsulation of Flexible Organic Light-Emitting Diodes

PDF

可视化

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 15

编辑推荐

Metrics

本文评价

[1]	张黎莉;邱一武;殷亚楠;王韬;周昕杰. 一种高温度稳定性的GaN基准电压源设计^*[J]. 电子与封装, 2023, 23(5): 50304-.
[2]	沈静曼;杨洋;焦小雨;宋琳琳;张军;王训春;许京荆;汪鑫. 基于有限元分析的柔性薄膜太阳电池互连热适应性研究^*[J]. 电子与封装, 2023, 23(4): 40205-.
[3]	张彤;刘树强;何亮;成绍恒;李柳暗;敖金平. GaN基互补型逻辑电路的研究进展及挑战^*[J]. 电子与封装, 2023, 23(1): 10101-.
[4]	彭荣;杨振波;王珺. 基于Al₂O₃/NEA121堆叠薄膜的水氧阻隔性能研究[J]. 电子与封装, 2022, 22(4): 40201-.
[5]	范学仕, 王祖锦, 唐茂洁, 彭杰. 一种柔性透明屏LED驱动芯片设计与实现[J]. 电子与封装, 2021, 21(7): 70101-.
[6]	彭荣. 基于OLED器件的封装方法研究[J]. 电子与封装, 2020, 20(5): 50101-.
[7]	曹正州,张艳飞,孙佩. 一款采用超前相位补偿技术的低压差线性稳压器[J]. 电子与封装, 2020, 20(3): 30307-.
[8]	杨帆;黄宇程;王银海;潘文宾. 硅外延电阻率测试稳定性研究[J]. 电子与封装, 2020, 20(12): 120404-.
[9]	刘键¹，胡跃明²，冷兴龙¹，杜鹃². 等离子增强化学气相沉积法低温生长SiO_x薄膜的针孔缺陷修复[J]. 电子与封装, 2020, 20(1): 10301-.
[10]	程　亮，赵子龙. 用于OLED驱动电路的振荡器设计[J]. 电子与封装, 2019, 19(4): 24-27.
[11]	周克钧，张鹏. 基于云架构的芯片设计平台初探[J]. 电子与封装, 2019, 19(2): 24-27.
[12]	曹正州，江燕，张旭东,谢文虎. 基于零极点追踪的高稳定性片内LDO电路设计[J]. 电子与封装, 2017, 17(6): 19-22.
[13]	石青宏，刘瑞庆，黄伟. Ni(W)Si/Si肖特基势垒二极管电学特性研究[J]. 电子与封装, 2017, 17(6): 41-44.
[14]	赵海，谢兴华，孙洋. 一种适用于超低功耗MCU的振荡器设计[J]. 电子与封装, 2017, 17(10): 17-20.
[15]	王宇星¹，吴　金². 基于反馈控制的高阶温度补偿带隙基准电路[J]. 电子与封装, 2016, 16(9): 18-23.