中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2018, Vol. 18 ›› Issue (6): 33 -37. doi: 10.16257/j.cnki.1681-1070.2018.0067

• 微电子制造与可靠性 • 上一篇    下一篇

二极管光生电流影响因素的仿真研究

刘承芳1,孙 鹏2, 3,高吴昊1,夏 云1,左慧玲1,陈万军1   

  1. 1. 电子科技大学电子薄膜与集成器件国家重点实验室,成都 6100542. 中国工程物理研究院微系统与太赫兹研究中心,成都 610200 3. 中国工程物理研究院电子工程研究所,四川 绵阳 621999
  • 出版日期:2018-06-20 发布日期:2020-02-19
  • 作者简介:刘承芳(1992—),女,四川资阳人,电子科技大学硕士研究生,研究方向为新型功率半导体器件与集成电路和系统。

Simulation Study on the Influence Factors of Diode Photocurrent

LIU Chengfang1, SUN Peng2,3, GAO Wuhao1, XIA Yun1, ZUO Huiling1, CHEN Wanjun1   

  1. 1.State Key Laboratory of Electronic Thin Film and Integrated Devices, UESTC, Chengdu 610054, China 2. Microsystem & Terahertz Research Center, China Academy Of Engineering Physics, Chengdu 610200, China 3. Institute of Electronic Engineering, China Academy Of Engineering Physics, Mianyang 621999, China
  • Online:2018-06-20 Published:2020-02-19

摘要: 通过TCAD二维仿真工具模拟光辐照环境,对二极管的光辐照响应进行了仿真研究。首先完成了相关仿真电路的搭建并列出了电路元件及二极管的结构参数,然后对光吸收的概念进行了解释并详细说明了如何在仿真软件中表示光照参数,在不超过硅材料本征吸收限的光照波长领域中,对二极管光生电流的影响因素进行了仿真研究,并给出了相关结论。扩大了光照波长的研究范围,为以后进一步研究硅器件的光辐照响应奠定了良好的基础。

关键词: 二极管, 光生电流, 光辐照, 二维仿真, 影响因素

Abstract: Through 2D TCAD simulation establishing light irradiation environment, simulated the light irradiation response of diodes. In this paper, completed the construction of the relevant circuit and listed the structural parameters of the circuit components and diodes firstly. Afterwards, the concept of optics absorption is described and the presentation of optics parameters in software is explained in detail. In the field of short-wavelength light, studied on the influencing factors of diode photocurrent and provided related conclusions. Expanded the research scope of optical wavelengths, laying a great foundation for further research on the light irradiation response of silicon devices.

Key words: diode, photocurrent, light irradiation, 2D simulation, influence factors

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