关键词: MEMS麦克风, 失效分析, 失效机理

Abstract: MEMS microphone is a micro-device that converts audio signals into electrical signals,of which the operation involves acoustics,mechanics and micro-electronics.Along with ever shrinking package size and enhancing performance,traditional electrical-test-based failure analysis cannot meet new requirements.A new failure analysis method is presented in the paper,in which the MEMS microphone package structure and working principle are referenced.The new failure analysis process includes audio signal test,mechanical properties and electrical performance test.In addition,traditional semiconductor physical failure analysis method is also used to dig out the root cause and the failure mechanism.

Key words: MEMS microphone, failure analysis, failure mechanism