关键词: 单项工艺, 反熔丝薄膜, DOE试验设计方法

Abstract: The Metal to Metal (MTM) anti-fuse film is the key process of MTM device. This paper introduces a DOE method for the development of MTM film process. In this DOE experiment based on CVD process equipment, RF power, reaction gas 1 flow and the spacing is input factor, and the MTM film thickness uniformity, refractive index and stress is output response. The MTM film process menu was developed successfully and process window was verified. This paper mainly provides a DOE method which is a example for the development of various key single process in the scientific research and production work.

Key words: single process , MTM anti-fuse film, DOE method