基于Al2O3/NEA121堆叠薄膜的水氧阻隔性能研究

doi:10.16257/j.cnki.1681-1070.2022.0403

电子与封装 ›› 2022, Vol. 22 ›› Issue (4): 040201 . doi: 10.16257/j.cnki.1681-1070.2022.0403

基于Al₂O₃/NEA121堆叠薄膜的水氧阻隔性能研究

彭荣;杨振波;王珺

广州科技职业技术大学信息工程学院电气工程及自动化专业，广州

收稿日期:2021-07-15 出版日期:2022-04-25 发布日期:2021-10-20
作者简介:彭荣（1992—），女，江西吉安人，硕士，讲师，研究方向为OLED和薄膜封装。

Research on Water and Oxygen Barrier Performance Based on Al2O3/NEA121Encapsulation Film

PENG Rong, YANG Zhenbo, WANG Jun

School of Information Engineering, Electrical engineering and automation major,Guangzhou Vocational and Technical University of Science and Technology,Guangzhou 510000, China

Received:2021-07-15 Online:2022-04-25 Published:2021-10-20

摘要/Abstract

摘要： 薄膜封装是有机电致发光器件柔性化亟需解决的关键技术难题。用NEA121树脂与Al₂O₃作为薄膜封装的有机膜与无机膜封装，封装薄膜的水氧阻隔性能通过钙膜测试。实验结果表明，3层堆叠Al₂O₃/NEA121封装后的水汽透过率（WVTR）达到2.1×10^-4 g/(m²·day)，封装薄膜失效原因是水汽通过封装薄膜缺陷点渗透，不断腐蚀钙膜导致封装失效，而采用无机/有机堆叠封装的方法薄膜的封装效果得到了改善。

关键词: 薄膜封装, 无机／有机叠层薄膜, 水汽透过率, 原子层沉积, 旋涂

Abstract: Thin-film encapsulation is a key technical problem that needs to be solved urgently in the flexibility of organic electroluminescent devices. NEA121 resin and Al₂O₃ are used as thin-film encapsulated organic and inorganic films. The water and oxygen barrier properties of the encapsulated film are obtained through calcium film testing. The experimental results show that the water vapor transmission rate (WVTR) after the three-layer stack Al₂O₃/ NEA121 package reaches 2.1×10^-4 g/(m²·day), and the failure of the package film is caused by the penetration of water vapor through the defect points of the package film and continuous corrosion of calcium membrane results in failure of the package, and inorganic/ organic stacked package encapsulation thin film effect is improved.

Key words: filmencapsulation, inorganic/organiclaminatedfilm, watervaportransmissionrate, atomiclayerdeposition, spincoating

中图分类号:

彭荣;杨振波;王珺. 基于Al₂O₃/NEA121堆叠薄膜的水氧阻隔性能研究[J]. 电子与封装, 2022, 22(4): 040201 .

PENG Rong, YANG Zhenbo, WANG Jun. Research on Water and Oxygen Barrier Performance Based on Al2O3/NEA121Encapsulation Film[J]. Electronics & Packaging, 2022, 22(4): 040201 .

参考文献

[1] YANG L, LI T J. A new thin-film encapsulation technology for organic light-emitting devices [J]. Journal of optoelectronics Laser, 2014, 25(5): 840-844.
[2] YANG D, YANG Y Q, DUAN Y, et al. Passivation properties of UV-Curable polymer for organic light emitting diodes[J]. Ecs Solid State Letters, 2013, 2(9): 31-33.
[3] KIM L H, JEONG Y J, AN T K, et al. Optimization of Al2O3/TiO2 nanolaminate thin films prepared with different oxide ratios, for use in organic light-emitting diode encapsulation, via plasma-enhanced atomic layer deposition[J]. Physical Chemistry Chemical Physics, 2016, 18(2): 1042-1049.
[4] GRAFF A, ALTMANN F, DZWILEWSKI A, et al. Analytical ETL/EML layer investigation of blue OLEDs[C]// Microscopy and Microanalysis, 2014(53):144-145.
[5] KOHARI Z, KOLLAR E, POHL L, et al. Nonlinear electro-thermal modeling and field-simulation of OLEDs for lighting applications II: Luminosity and failure analysis[J]. Microelectronics Journal, 2013, 44(11):1011-1018.
[6] WANG F K, LU Y C. Useful lifetime of white OLED under a constant stress accelerated life testing[J]. Optical & Quantum Electronics, 2015, 47(2):323-329.
[7] RIEDEL D, DLUGOSCH J, WEHLUS T, et al. Extracting and shaping the light of OLED devices[C]//Organic Light Emitting Materials and Devices XIX. International Society for Optics and Photonics, 2015:1364.
[8] SU S H, HOU C C, SHIEH R S, et al. Enhancing efficiency of organic light-emitting diodes using lithium-doped electron transport layer[J]. Japanese Journal of Applied Physics, 2008, 47(4):3193-3195.
[9] SINGH A, NEHM F, MULLER-MESKAMP L, et al. OLED compatible water-based nanolaminate encapsulation systems using ozone based starting layer[J]. Organic Electronics, 2014, 15(10):2587-2592.
[10] MIN H O, PARK E K, KIM S M, et al. Long-term stability of SiNx thin-film barriers deposited by low temperature PECVD for OLED[J]. 2016, 5(5):55-58.
[11] JIMBO Y, TAMATSUKURI Y, ITO M, et al. Reliability and mechanical durability tests of flexible OLED with ALD coating[J]. Journal of the Society for Information Display, 2016, 23(7):313-318.
[12] KIM H J, HYUN PARK S, KIM Y J, et al. Formation of a bilayer of low-temperature CVD-SiO2 and Sputtered Al2O3 films on polyethylene terephthalate substrates for OLED encapsulation Layer[C]// Electrochemical Society Meeting Abstracts 224. 2013 (2):59-59.
[13] LIFKA H, TANASE C, MCCULLOCH D, et al. 53.4: Ultra-thin flexible OLED device[J]. Sid Symposium Digest of Technical Papers, 2007, 38(1):1599-1602.
[14] KIM B J, PARK H, SEONG H, et al. A single-chamber system of initiated chemical vapor deposition and atomic layer deposition for fabrication of organic /inorganic multilayer films[J] Advanced Engineering Materials, 2017,19( 6): 1600819．
[15] LEE L,YOON K H，JUNG J W, et al. Ultra gas-proof polymer hybrid thin layer[J]. Nano Lett. 2018, 18(9): 5461-5466．
[16] 彭荣. OLED封装薄膜水汽透过率测试方法研究[J]. 电子与封装，2020, 20(2): 020203.
[17] YU D, YANG Y Q, CHEN Z, et al. Recent progress on thin-film encapsulation technologies for organic electronic devices[J]. Optics Communications, 2016, 362: 43-49.
[18] SCHUBERT S, KLUMBIES H, MLLER-MESKAMP L, et al. Electrical calcium test for moisture barrier evaluation for organic devices[J]. Review of Scientific Instruments, 2011, 82(9): 094101．

中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

基于Al₂O₃/NEA121堆叠薄膜的水氧阻隔性能研究

Research on Water and Oxygen Barrier Performance Based on Al2O3/NEA121Encapsulation Film

PDF

可视化

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 4

编辑推荐

Metrics

本文评价

[1]	周钰卜;高桦宇;郑华;邹建华;林生晃;李显博;刘佰全. 柔性有机发光二极管的薄膜封装研究进展^*[J]. 电子与封装, 2023, 23(7): 70203-.
[2]	彭荣. 基于OLED器件的封装方法研究[J]. 电子与封装, 2020, 20(5): 50101-.
[3]	彭荣. OLED 封装薄膜水汽透过率测试方法研究[J]. 电子与封装, 2020, 20(2): 20203-.
[4]	刘键¹，胡跃明²，冷兴龙¹，杜鹃². 等离子增强化学气相沉积法低温生长SiO_x薄膜的针孔缺陷修复[J]. 电子与封装, 2020, 20(1): 10301-.