关键词: 滑移线, 检验误差, 量化控制

Abstract: At present, the main factor restricting the high-quality production of large-size thick-layer silicon epitaxial products is the surface slip line, and the process control of the slip line heavily relies on the complete and accurate inspection and identification of the slip line. By studying the characterization methods of slip lines with different macro-expression, the error sources of various inspections are compared, the main factors affecting the quantitative calculation of silicon epitaxial slip lines are analyzed, and a scientific and reasonable inspection strategy is formulated to improve the accuracy and stability of slip line inspection in the process of mass production, which has achieved remarkable results.

Key words: slip line, inspection error, quantitative control