关键词: 平行缝焊, 陶瓷封装, 仿真

Abstract: Parallel seam sealing process is one of the most reliability hermetic sealing technology extensivly used in ceramic package. The plating of lids will be melted during the welding process and the kovar lid will be exposed to the environment, which leads to the failure of salt-spray corrosion. Two kinds of plating structure are chosen and Abaqus software is used to analyze the distribution of temperature on kovar lid and its plating. The results show that, Ni/Au plating structure can ensure the reliability of parallel seam sealing on salt-spray corrosion during the temperature range of 1200~1400 ℃, which hopes to ensure the reliability of the salt spray corrosion resistance of the parallel welds, and the mechanism of salt-spray corrosion resistance is given.

Key words: parallelseamsealing, ceramicpackage, simulation