基于双极载流子导电的新型恒流器件

doi:10.16257/j.cnki.1681-1070.2020.0513

电子与封装 ›› 2020, Vol. 20 ›› Issue (5): 050403 . doi: 10.16257/j.cnki.1681-1070.2020.0513

• 微电子制造与可靠性 • 上一篇

基于双极载流子导电的新型恒流器件

何林蓉,乔明

电子科技大学，成都　610054

出版日期:2020-05-25 发布日期:2020-05-25
作者简介:何林蓉（1994—），女，四川巴中人，电子科技大学集成电路工程专业硕士在读，主要研究方向为硅基功率半导体器件。

Novel Current Regulator Device Based on Bipolar Carrier Conduction

HE Linrong, QIAO Ming

University of Electronic Science and Technology of China, Chengdu 610054, China

Online:2020-05-25 Published:2020-05-25

摘要/Abstract

摘要： 提出了一种基于双极载流子导电、具有低开启电压VK和高反向击穿电压BVR的恒流器件，并进行了初步的实验验证。利用Tsuprem4和Medici仿真工具对器件的恒定电流IS、开启电压VK、正向击穿电压BVF和反向击穿电压BVR等电学参数进行了仿真，优化了外延层电阻率ρepi、外延层厚度Tepi、JFET注入剂量DJFET、pwell注入窗口间距WJFET等参数。试验结果显示，该器件工作于正向时，开启电压VK约为1.6 V，恒定电流IS约为31 mA，正向击穿电压BVF为55 V；该器件工作在反向时，反向击穿电压BVR约为200 V。

关键词: 恒流器件；恒定电流；开启电压；击穿电压

Abstract: A constant current device based on bipolar carrier conduction, with low threshold voltage VK and high reverse breakdown voltage BVR was proposed and initially experimentally demonstrated. Some electrical parameters such as steady current IS, threshold voltage VK, forward breakdown voltage BVF and reverse breakdown voltage BVR were simulated through Tsuprem4 and Medici simulation tools, and the device parameters, such as epitaxial layer resistivity ρepi and epitaxial layer thickness Tepi, JFET implantation dose DJFET, pwell implantation open windows spacing WJFET were optimized. The experimental results show that the device presents the threshold voltage VK about 1.6 V, the steady current IS about 31 mA and the forward breakdown voltage BVF of 55 V under forward conduction mode; when the device works under reverse blocking mode, the reverse breakdown voltage BVR is about 200 V.

Key words: current regulator device; steady current; threshold voltage; breakdown voltage

中图分类号:

TN31

何林蓉,乔明. 基于双极载流子导电的新型恒流器件[J]. 电子与封装, 2020, 20(5): 050403 .

HE Linrong, QIAO Ming. Novel Current Regulator Device Based on Bipolar Carrier Conduction[J]. Electronics & Packaging, 2020, 20(5): 050403 .

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中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

基于双极载流子导电的新型恒流器件

Novel Current Regulator Device Based on Bipolar Carrier Conduction

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