中国半导体行业协会封装分会会刊

中国电子学会电子制造与封装技术分会会刊

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电子与封装 ›› 2023, Vol. 23 ›› Issue (7): 070207 . doi: 10.16257/j.cnki.1681-1070.2023.0096

• 封装、组装与测试 • 上一篇    下一篇

封装用环氧银胶的配制工艺及性能研究

鄂依阳1;田兆波2,4;迟克禹3;江仁要2;孙琪3;吕尤2;祝渊1,2,5   

  1. 1. 南方科技大学创新创业学院,深圳 518055;2. 南方科技大学深港微电子学院,深圳 518055;
  • 收稿日期:2022-08-20 出版日期:2023-07-26 发布日期:2023-07-26
  • 作者简介:鄂依阳(1998—),男,黑龙江牡丹江人,硕士研究生,主要研究方向为高性能导电银胶的制备。

Study on Preparation Technology and Properties of Epoxy Silver Adhesive Used for Encapsulation

E Yiyang1, TIAN Zhaobo2,4, CHI Keyu3, JIANG Renyao2, SUN Qi3, LYU You2, ZHU Yuan1,2,5   

  1. 1. School of Innovation and Entrepreneurship, Southern University of Science and Technology, Shenzhen 518055, China; 2.School of Microelectronics, Southern University of Science andTechnology, Shenzhen 518055, China; 3. FoShan Southern China Institute for New Materials,Foshan 528000, China; 4. ShenzhenBaopeng New Materials Technology Co.,Ltd., Shenzhen518055, China;5. Engineering Research Center of Integrated Circuits for Next-GenerationCommunications, Southern Universityof Science and Technology, Shenzhen 518055, China
  • Received:2022-08-20 Online:2023-07-26 Published:2023-07-26

摘要: 随着电子设备向小型化和轻量化发展,电子封装也趋于小尺寸、精密化和结构复杂化。传统钎焊互连越来越难以解决精密的封装结构产生的散热问题。银胶作为一种高性能、低污染和易操作的新型互连材料,逐渐替代钎焊并在高端芯片互连等领域发挥着越来越重要的作用。针对市场银胶热导率和电阻率难以满足需求的难题,采用环氧树脂、片状银粉、改性脂环胺固化剂、偶联剂、稀释剂和催化剂改善了环氧树脂基银胶,系统研究了银粉形貌、比例和制备工艺等对银胶热导率和电阻率等的影响,并获得了高热导率[7.21 W·(m·K)-1]、低体积电阻率 (4.46×10-5Ω·cm)的环氧银胶。通过在不同基板间进行粘接热阻测试,验证了所获得的环氧银胶在基板间具有较低的热阻,其有望应用于高端芯片封装的互连。

关键词: 银胶, 热导率, 体积电阻率, 热阻

Abstract: With the development of miniaturization and lightweight of electronic devices, electronic packaging is also tending to be smaller in size, more precise and complex in structures. Traditional soldered interconnects are becoming increasingly difficult to solve the heat dissipation problemscaused by the precision packaging structures. As a new type of interconnect material with high performance, low pollution and easy operation, silver glue is gradually replacingbrazing and playing an increasingly important role in high-end chip interconnection and other fields. In response tothe difficulty that the thermal conductivity and resistivity of silver glue in the market can hardly meet the demand,the epoxy resin, flake silver powder, modified alicyclic amine curing agent, coupling agent, diluent and catalyst are used to improve the epoxy resin-based silver glue, and the effects of silver powder morphology, ratio and preparation process on the thermal conductivity and resistivity of silver glue are systematically studied, and high thermal conductivity [7.21 W·(m·K)-1] and low volume resistivity (4.46×10-5Ω·cm) of epoxy silver glue.Through the bonding thermal resistance test between different substrates, it is verified that the obtained epoxy silver adhesive has lower thermal resistance between substrates, which is expected to be applied to the interconnection of high-end chip packaging.

Key words: silver glue, thermal conductivity, volume resistivity, thermal resistance

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