金刚石离子注入射程及损伤的模拟研究
袁野, 赵瓛, 姬常晓, 黄华山, 倪安民, 杨金石
Simulation Research on the Ion Implantation Range and Damage of Diamond
YUAN Ye, ZHAO Huan, JI Changxiao, HUANG Huashan, NI Anmin, YANG Jinshi
电子与封装
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2024, (11): 110402
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DOI: 10.16257/j.cnki.1681-1070.2024.0153
