VIISta HCS离子注入机在离子束优化与检测期间的金属污染探究及改善
李天清
Exploration and Improvement of Metal Contamination During Ion Beam Optimization and Detection Using VIISta HCS Ion Implantation Machine
LI Tianqing
电子与封装
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2025, (2): 20402
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DOI: 10.16257/j.cnki.1681-1070.2025.0026
