应力缓冲层对玻璃基板填孔结构内应力及可靠性的调控规律研究*
王展博，张泽玺，杨斌，郭旭，杨冠南，张昱，黄光汉，崔成强
Regulation Study of Stress Buffer Layer on the Internal Stress and Reliability of Glass Substrate Hole-Filling Structures
WANG Zhanbo, ZHANG Zexi, YANG Bin, GUO Xu, YANG Guannan, ZHANG Yu, HUANG Guanghan, CUI Chengqiang
电子与封装
.
2025, (7): 70103
.
DOI: 10.16257/j.cnki.1681-1070.2025.0122
