硅基氮化镓外延应力调控与缺陷抑制研究
邓雪华, 许万里, 仇光寅, 王银海, 宋占洋, 李国鹏
Study on Stress
Regulation and Defect Suppression in GaN-on-Si Epitaxy
DENG Xuehua, XU Wanli, QIU Guangyin, WANG Yinhai, SONG Zhanyang, LI Guopeng
电子与封装
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0, (): 0
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DOI: 10.16257/j.cnki.1681-1070.2027.0021
