基于域分解门控物理信息神经网络的加热盘温度实时预测
解跃龙1, 顾杰斐1, 宿磊1, 李可1, 明雪飞2, 李猛3
Real-Time Prediction of Heating Chuck
Temperature Using a Domain-Decomposed Gated Physics-Informed Neural Networks
XIE Yuelong1, GU Jiefei1, SU Lei1, LI Ke1, MING Xuefei2, LI Meng3
电子与封装
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DOI: 10.16257/j.cnki.1681-1070.2027.0020
