面向高性能器件的SIPOS薄膜制备：沉积压力的优化与影响分析
张可可，安湘琛，袁源
Preparation of SIPOS Thin Films for High-Performance Devices: Optimization and Impact Analysis of Deposition Pressure
ZHANG Keke, AN Xiangchen, YUAN Yuan
电子与封装
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2026, (5): 50402
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DOI: 10.16257/j.cnki.1681-1070.2026.0054
