高精度电子束光刻技术在微纳加工中的应用

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胡超，王兴平，尤春，孙锋

Application of High Resolution Electron Beam Lithography Technology in Micro-and Nano-fabrication

HU Chao,WANG Xingping,YOU Chun,SUN Feng

电子与封装 . 2017, (5): 28 -32 . DOI: 10.16257/j.cnki.1681-1070.2017.0060